Zobrazeno 1 - 3
of 3
pro vyhledávání: '"parasitic feedthrough subtraction"'
Autor:
Andi Setiono, Michael Fahrbach, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Iqbal Syamsu, Hutomo Suryo Wasisto, Erwin Peiner
Publikováno v:
Sensors, Vol 21, Iss 12, p 4088 (2021)
An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in t
Externí odkaz:
https://doaj.org/article/eb2a87d6b1e74499a37912c9a303a953
Autor:
Ernest J. Fantner, Andi Setiono, Hutomo Suryo Wasisto, Iqbal Syamsu, Alexander Deutschinger, Michael Fahrbach, Erwin Peiner, Christian H. Schwalb
Publikováno v:
Sensors, Vol 21, Iss 4088, p 4088 (2021)
Sensors (Basel, Switzerland)
Sensors
Volume 21
Issue 12
Sensors (Basel, Switzerland)
Sensors
Volume 21
Issue 12
An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7a6eaac8002d244fe14ebea11226737f
https://www.mdpi.com/1424-8220/21/12/4088
https://www.mdpi.com/1424-8220/21/12/4088
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