Zobrazeno 1 - 3
of 3
pro vyhledávání: '"micro-ultrasonic machining (MUM)"'
Publikováno v:
Materials, Vol 16, Iss 7, p 2683 (2023)
Micro-electro-mechanical systems (MEMS) hemispherical resonant gyroscopes are used in a wide range of applications in defense technology, electronics, aerospace, etc. The surface roughness of the silicon micro-hemisphere concave molds (CMs) inside th
Externí odkaz:
https://doaj.org/article/cf0056bb0f514f14a8547f9ff5bda1b7
Autor:
Yin, Jiateng1,2 (AUTHOR), Zhao, Jun1,2 (AUTHOR) jzhao@zjut.edu.cn, Song, Fengqi1,2 (AUTHOR), Xu, Xinqiang1,2 (AUTHOR), Lan, Yeshen1,3 (AUTHOR)
Publikováno v:
Materials (1996-1944). Apr2023, Vol. 16 Issue 7, p2683. 16p.
Publikováno v:
Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science (Sage Publications, Ltd.); Aug2024, Vol. 238 Issue 16, p8294-8329, 36p