Integration of P-CuO thin sputtered layers onto microsensor platforms for gas sensing

Autor: Philippe Menini, Antoine Barnabé, Chabane Talhi, Audrey Chapelle, Frédéric Blanc, Lionel Presmanes, Imane El Younsi, Yohann Thimont, Philippe Tailhades, Corine Bonningue

Publikováno v: Sensors (Basel, Switzerland)
Sensors
Sensors, MDPI, 2017, 17 (6), pp.1409. ⟨10.3390/s17061409⟩
Sensors, 2017, 17 (6), pp.1409. ⟨10.3390/s17061409⟩
Sensors; Volume 17; Issue 6; Pages: 1409

International audience; P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could b

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::09d5f8bbb7dae04ce804014ecd1cd2d4
https://oatao.univ-toulouse.fr/19789/

Highly Sensitive Sputtered ZnO:Ga Thin Films Integrated by a Simple Stencil Mask Process on Microsensor Platforms for Sub-ppm Acetaldehyde Detection

Autor: Presmanes, Lionel, Thimont, Yohann, Chapelle, Audrey, Blanc, Frédéric, Talhi, Chabane, Bonningue, Corine, Barnabé, Antoine, Menini, Philippe, Tailhades, Philippe

Publikováno v: Sensors
Sensors, MDPI, 2017, 17 (5), pp.1055. ⟨10.3390/s17051055⟩
Sensors (Basel, Switzerland)
Sensors, 2017, 17 (5), pp.1055. ⟨10.3390/s17051055⟩

International audience; The integration of a 50-nm-thick layer of an innovative sensitive material on microsensors has been developed based on silicon micro-hotplates. In this study, integration of ZnO:Ga via radio-frequency (RF) sputtering has been

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=pmid_dedup__::df67fd8f3b6c8d2bc65dbf8321da0937
https://hal.archives-ouvertes.fr/hal-01759300/document

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