Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level

Autor: Mohamed Lamjed Bouazizi, Bandar Alzahrani, Youichi Bitou, Vít Lédl, Nabil Anwer, Xiangchao Zhang, Hichem Nouira, Ville Heikkinen, Yassir Arezki, Yohan Kondo, Rong Su, Christof Pruss, Charyar Mehdi-Souzani, Richard Leach, François Leprete, Pavel Posta, Christian Schober

Publikováno v: Arezki, Y, Su, R, Heikkinen, V, Leprete, F, Posta, P, Bitou, Y, Schober, C, Mehdi-Souzani, C, Alzahrani, B A M, Zhang, X, Kondo, Y, Pruss, C, Ledl, V, Anwer, N, Bouazizi, M L, Leach, R & Nouira, H 2021, ' Traceable reference full metrology chain for innovative aspheric and freeform optical surfaces accurate at the nanometer level ', Sensors, vol. 21, no. 4, 1103, pp. 1-19 . https://doi.org/10.3390/s21041103
Sensors
Volume 21
Issue 4
Sensors (Basel, Switzerland)
Sensors, Vol 21, Iss 1103, p 1103 (2021)

The design of innovative reference aspheric and freeform optical elements was investigated with the aim of calibration and verification of ultra-high accurate measurement systems. The verification is dedicated to form error analysis of aspherical and

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http://nbn-resolving.de/urn:nbn:de:bsz:93-opus-ds-126758