Zobrazeno 1 - 1
of 1
pro vyhledávání: '"interference reflection spectroscopy"'
Publikováno v:
Scopus-Elsevier
Sintered targets of ZrO 2 and Al 2 O 3 are ablated by KrF excimer laser radiation. The processing gas atmosphere consists of O 2 at typical pressures of 10 -3 -l mbar. Films with a thickness of 2(1(1-70n nm are deposited on a Pt/Ti/Si multilayer subs
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6cac5ea525b8809134d33cbc732fc018
https://doi.org/10.1016/s0257-8972(97)00661-0
https://doi.org/10.1016/s0257-8972(97)00661-0
