Zobrazeno 1 - 2
of 2
pro vyhledávání: '"ink/aerosol jet printing"'
Autor:
Alexey A. Vasiliev, Anton V. Nisan, Gleb N. Potapov, Nikolay N. Samotaev, Konstantin Yu. Oblov, Anastasia V. Ivanova
Publikováno v:
Proceedings, Vol 1, Iss 4, p 324 (2017)
The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we f
Externí odkaz:
https://doaj.org/article/27913c71c77e47e5addcfe0b3e0f185b
Autor:
Anton V. Nisan, Anastasia Ivanova, Konstantin Oblov, Nikolay Samotaev, Gleb N. Potapov, Alexey Vasiliev
Publikováno v:
Proceedings, Vol 1, Iss 4, p 324 (2017)
The application of thin LTCC is a very interesting and promising approach to the fabrication of ceramic MEMS gas sensors. The attempts to use this material were restricted till now by the thickness of commercial material (>50 μm). In this work, we f