Contactless device for the fast conductivity characterization of a large range semiconductors

Autor: Y. Le Bihan, Denis Mencaraglia, Florent Loete

Publikováno v: International Symposium on Semiconductor Manufacturing (ISSM 2016)
International Symposium on Semiconductor Manufacturing (ISSM 2016), Dec 2016, Tokyo, Japan. 4p., ⟨10.1109/issm.2016.7934522⟩

International audience; We report on the development and application of a brand-new contactless method based on eddy currents with a view to designing a generic apparatus for the characterization of some transport properties of a large range of semic

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::93a475b4fab438d012c2f417ba195d42
https://hal.archives-ouvertes.fr/hal-01637727