Zobrazeno 1 - 4
of 4
pro vyhledávání: '"dotted-I interconnect trees"'
Electromigration tests on different Cu dual-damascene interconnect tree structures consisting of various numbers of straight via-to-via lines connected at the common middle terminal have been carried out. Like Al-based interconnects, the reliability
Externí odkaz:
http://hdl.handle.net/1721.1/3730
Publikováno v:
Journal of Applied Physics; 7/15/2003, Vol. 94 Issue 2, p1222, 7p, 1 Black and White Photograph, 2 Diagrams, 2 Charts, 3 Graphs, 1 Map
Publikováno v:
MRS Online Proceedings Library; 2003, Vol. 766 Issue 1, p1-6, 6p
Publikováno v:
MRS Online Proceedings Library; 2002, Vol. 716 Issue 1, p1-6, 6p