Low-cost Technology For Multilayer Electroplated Parts Using Laminated Dry Film Resist.

Autor: Lorenz, H., Paratte, L., Luthier, R., de Rooi, N.F., Renaud, P.

Publikováno v: Proceedings of the International Solid-State Sensors & Actuators Conference - TRANSDUCERS '95; 1995, Issue 1, p569-572, 4p