Detecting and sizing the Earth with PLATO: A feasibility study based on solar data

Autor: Krenn, A. F., Lendl, M., Sulis, S., Deleuil, M., Hofmeister, S. J., Jannsen, N., Fossati, L., De Ridder, J., Seynaeve, D., Jarolim, R., Veronig, A. M.

Context. The PLAnetary Transits and Oscillations of stars (PLATO) mission will observe the same area of the sky continuously for at least two years in an effort to detect transit signals of an Earth-like planet orbiting a solar-like star. Aims. We ai

Externí odkaz: http://arxiv.org/abs/2410.20077

Panopticon: a novel deep learning model to detect single transit events with no prior data filtering in PLATO light curves

Autor: Vivien, H. G., Deleuil, M., Jannsen, N., De Ridder, J., Seynaeve, D., Carpine, M. -A., Zerah, Y.

To prepare for the analyses of the future PLATO light curves, we develop a deep learning model, Panopticon, to detect transits in high precision photometric light curves. Since PLATO's main objective is the detection of temperate Earth-size planets a

Externí odkaz: http://arxiv.org/abs/2409.03466

Addressing Class Imbalance and Data Limitations in Advanced Node Semiconductor Defect Inspection: A Generative Approach for SEM Images

Autor: Dey, Bappaditya, De Ridder, Vic, Blanco, Victor, Halder, Sandip, Van Waeyenberge, Bartel

Precision in identifying nanometer-scale device-killer defects is crucial in both semiconductor research and development as well as in production processes. The effectiveness of existing ML-based approaches in this context is largely limited by the s

Externí odkaz: http://arxiv.org/abs/2407.10348

The PLATO Mission

Autor: Rauer, Heike, Aerts, Conny, Cabrera, Juan, Deleuil, Magali, Erikson, Anders, Gizon, Laurent, Goupil, Mariejo, Heras, Ana, Lorenzo-Alvarez, Jose, Marliani, Filippo, Martin-Garcia, César, Mas-Hesse, J. Miguel, O'Rourke, Laurence, Osborn, Hugh, Pagano, Isabella, Piotto, Giampaolo, Pollacco, Don, Ragazzoni, Roberto, Ramsay, Gavin, Udry, Stéphane, Appourchaux, Thierry, Benz, Willy, Brandeker, Alexis, Güdel, Manuel, Janot-Pacheco, Eduardo, Kabath, Petr, Kjeldsen, Hans, Min, Michiel, Santos, Nuno, Smith, Alan, Suarez, Juan-Carlos, Werner, Stephanie C., Aboudan, Alessio, Abreu, Manuel, a, Lorena Acu, Adams, Moritz, Adibekyan, Vardan, Affer, Laura, Agneray, François, Agnor, Craig, Børsen-Koch, Victor Aguirre, Ahmed, Saad, Aigrain, Suzanne, Al-Bahlawan, Ashraf, Gil, M de los Angeles Alcacera, Alei, Eleonora, Alencar, Silvia, Alexander, Richard, Alfonso-Garzón, Julia, Alibert, Yann, Prieto, Carlos Allende, Almeida, Leonardo, Sobrino, Roi Alonso, Altavilla, Giuseppe, Althaus, Christian, Trujillo, Luis Alonso Alvarez, Amarsi, Anish, Eiff, Matthias Ammler-von, Amôres, Eduardo, Andrade, Laerte, Antoniadis-Karnavas, Alexandros, António, Carlos, del Moral, Beatriz Aparicio, Appolloni, Matteo, Arena, Claudio, Armstrong, David, Aliaga, Jose Aroca, Asplund, Martin, Audenaert, Jeroen, Auricchio, Natalia, Avelino, Pedro, Baeke, Ann, Baillié, Kevin, Balado, Ana, Balagueró, Pau Ballber, Balestra, Andrea, Ball, Warrick, Ballans, Herve, Ballot, Jerome, Barban, Caroline, Barbary, Gaële, Barbieri, Mauro, Forteza, Sebasti Barceló, Barker, Adrian, Barklem, Paul, Barnes, Sydney, Navascues, David Barrado, Barragan, Oscar, Baruteau, Clément, Basu, Sarbani, Baudin, Frederic, Baumeister, Philipp, Bayliss, Daniel, Bazot, Michael, Beck, Paul G., Bedding, Tim, Belkacem, Kevin, Bellinger, Earl, Benatti, Serena, Benomar, Othman, Bérard, Diane, Bergemann, Maria, Bergomi, Maria, Bernardo, Pierre, Biazzo, Katia, Bignamini, Andrea, Bigot, Lionel, Billot, Nicolas, Binet, Martin, Biondi, David, Biondi, Federico, Birch, Aaron C., Bitsch, Bertram, Ceballos, Paz Victoria Bluhm, Bódi, Attila, Bognár, Zsófia, Boisse, Isabelle, Bolmont, Emeline, Bonanno, Alfio, Bonavita, Mariangela, Bonfanti, Andrea, Bonfils, Xavier, Bonito, Rosaria, Bonomo, Aldo Stefano, Börner, Anko, Saikia, Sudeshna Boro, Martín, Elisa Borreguero, Borsa, Francesco, Borsato, Luca, Bossini, Diego, Bouchy, Francois, Boué, Gwenaël, Boufleur, Rodrigo, Boumier, Patrick, Bourrier, Vincent, Bowman, Dominic M., Bozzo, Enrico, Bradley, Louisa, Bray, John, Bressan, Alessandro, Breton, Sylvain, Brienza, Daniele, Brito, Ana, Brogi, Matteo, Brown, Beverly, Brown, David J. A., Brun, Allan Sacha, Bruno, Giovanni, Bruns, Michael, Buchhave, Lars A., Bugnet, Lisa, Buldgen, Gaël, Burgess, Patrick, Busatta, Andrea, Busso, Giorgia, Buzasi, Derek, Caballero, José A., Cabral, Alexandre, Gomez, Juan-Francisco Cabrero, Calderone, Flavia, Cameron, Robert, Cameron, Andrew, Campante, Tiago, Gestal, Néstor Campos, Martins, Bruno Leonardo Canto, Cara, Christophe, Carone, Ludmila, Carrasco, Josep Manel, Casagrande, Luca, Casewell, Sarah L., Cassisi, Santi, Castellani, Marco, Castro, Matthieu, Catala, Claude, Fernández, Irene Catalán, Catelan, Márcio, Cegla, Heather, Cerruti, Chiara, Cessa, Virginie, Chadid, Merieme, Chaplin, William, Charpinet, Stephane, Chiappini, Cristina, Chiarucci, Simone, Chiavassa, Andrea, Chinellato, Simonetta, Chirulli, Giovanni, Christensen-Dalsgaard, Jørgen, Church, Ross, Claret, Antonio, Clarke, Cathie, Claudi, Riccardo, Clermont, Lionel, Coelho, Hugo, Coelho, Joao, Cogato, Fabrizio, Colomé, Josep, Condamin, Mathieu, García, Fernando Conde, Conseil, Simon, Corbard, Thierry, Correia, Alexandre C. M., Corsaro, Enrico, Cosentino, Rosario, Costes, Jean, Cottinelli, Andrea, Covone, Giovanni, Creevey, Orlagh L., Crida, Aurelien, Csizmadia, Szilard, Cunha, Margarida, Curry, Patrick, da Costa, Jefferson, da Silva, Francys, Dalal, Shweta, Damasso, Mario, Damiani, Cilia, Damiani, Francesco, Chagas, Maria Liduina das, Davies, Melvyn, Davies, Guy, Davies, Ben, Davison, Gary, de Almeida, Leandro, de Angeli, Francesca, de Barros, Susana Cristina Cabral, Leão, Izan de Castro, de Freitas, Daniel Brito, de Freitas, Marcia Cristina, De Martino, Domitilla, de Medeiros, José Renan, de Paula, Luiz Alberto, Gómez, Álvaro de Pedraza, de Plaa, Jelle, De Ridder, Joris, Deal, Morgan, Decin, Leen, Deeg, Hans, Innocenti, Scilla Degl, Deheuvels, Sebastien, del Burgo, Carlos, Del Sordo, Fabio, Delgado-Mena, Elisa, Demangeon, Olivier, Denk, Tilmann, Derekas, Aliz, Desert, Jean-Michel, Desidera, Silvano, Dexet, Marc, Di Criscienzo, Marcella, Di Giorgio, Anna Maria, Di Mauro, Maria Pia, Rial, Federico Jose Diaz, Díaz-García, José-Javier, Dima, Marco, Dinuzzi, Giacomo, Dionatos, Odysseas, Distefano, Elisa, Nascimento Jr., Jose-Dias do, Domingo, Albert, D'Orazi, Valentina, Dorn, Caroline, Doyle, Lauren, Duarte, Elena, Ducellier, Florent, Dumaye, Luc, Dumusque, Xavier, Dupret, Marc-Antoine, Eggenberger, Patrick, Ehrenreich, David, Eigmüller, Philipp, Eising, Johannes, Emilio, Marcelo, Eriksson, Kjell, Ermocida, Marco, Giribaldi, Riano Isidoro Escate, Eschen, Yoshi, ez, Lucía Espinosa Yá, Estrela, In s, Evans, Dafydd Wyn, Fabbian, Damian, Fabrizio, Michele, Faria, João Pedro, Farina, Maria, Farinato, Jacopo, Feliz, Dax, Feltzing, Sofia, Fenouillet, Thomas, Fernández, Miguel, Ferrari, Lorenza, Ferraz-Mello, Sylvio, Fialho, Fabio, Fienga, Agnes, Figueira, Pedro, Fiori, Laura, Flaccomio, Ettore, Focardi, Mauro, Foley, Steve, Fontignie, Jean, Ford, Dominic, Fornazier, Karin, Forveille, Thierry, Fossati, Luca, Franca, Rodrigo de Marca, da Silva, Lucas Franco, Frasca, Antonio, Fridlund, Malcolm, Furlan, Marco, Gabler, Sarah-Maria, Gaido, Marco, Gallagher, Andrew, Sempere, Paloma I. Gallego, Galli, Emanuele, García, Rafael A., Hernández, Antonio García, Munoz, Antonio Garcia, García-Vázquez, Hugo, Haba, Rafael Garrido, Gaulme, Patrick, Gauthier, Nicolas, Gehan, Charlotte, Gent, Matthew, Georgieva, Iskra, Ghigo, Mauro, Giana, Edoardo, Gill, Samuel, Girardi, Leo, Winter, Silvia Giuliatti, Giusi, Giovanni, da Silva, João Gomes, Zazo, Luis Jorge Gómez, Gomez-Lopez, Juan Manuel, Hernández, Jonay Isai González, Murillo, Kevin Gonzalez, Melchor, Alejandro Gonzalo, Gorius, Nicolas, Gouel, Pierre-Vincent, Goulty, Duncan, Granata, Valentina, Grenfell, John Lee, bach, Denis Grie, Grolleau, Emmanuel, Grouffal, Salomé, Grziwa, Sascha, Guarcello, Mario Giuseppe, Gueguen, Lo c, Guenther, Eike Wolf, Guilhem, Terrasa, Guillerot, Lucas, Guillot, Tristan, Guiot, Pierre, Guterman, Pascal, Gutiérrez, Antonio, Gutiérrez-Canales, Fernando, Hagelberg, Janis, Haldemann, Jonas, Hall, Cassandra, Handberg, Rasmus, Harrison, Ian, Harrison, Diana L., Hasiba, Johann, Haswell, Carole A., Hatalova, Petra, Hatzes, Artie, Haywood, Raphaelle, Hébrard, Guillaume, Heckes, Frank, Heiter, Ulrike, Hekker, Saskia, Heller, René, Helling, Christiane, Helminiak, Krzysztof, Hemsley, Simon, Heng, Kevin, Herbst, Konstantin, Hermans, Aline, Hermes, JJ, Torres, Nadia Hidalgo, Hinkel, Natalie, Hobbs, David, Hodgkin, Simon, Hofmann, Karl, Hojjatpanah, Saeed, Houdek, Günter, Huber, Daniel, Huesler, Joseph, Hui-Bon-Hoa, Alain, Huygen, Rik, Huynh, Duc-Dat, Iro, Nicolas, Irwin, Jonathan, Irwin, Mike, Izidoro, André, Jacquinod, Sophie, Jannsen, Nicholas Emborg, Janson, Markus, Jeszenszky, Harald, Jiang, Chen, Mancebo, Antonio José Jimenez, Jofre, Paula, Johansen, Anders, Johnston, Cole, Jones, Geraint, Kallinger, Thomas, Kálmán, Szilárd, Kanitz, Thomas, Karjalainen, Marie, Karjalainen, Raine, Karoff, Christoffer, Kawaler, Steven, Kawata, Daisuke, Keereman, Arnoud, Keiderling, David, Kennedy, Tom, Kenworthy, Matthew, Kerschbaum, Franz, Kidger, Mark, Kiefer, Flavien, Kintziger, Christian, Kislyakova, Kristina, Kiss, László, Klagyivik, Peter, Klahr, Hubert, Klevas, Jonas, Kochukhov, Oleg, Köhler, Ulrich, Kolb, Ulrich, Koncz, Alexander, Korth, Judith, Kostogryz, Nadiia, Kovács, Gábor, Kovács, József, Kozhura, Oleg, Krivova, Natalie, Kucinskas, Arunas, Kuhlemann, Ilyas, Kupka, Friedrich, Laauwen, Wouter, Labiano, Alvaro, Lagarde, Nadege, Laget, Philippe, Laky, Gunter, Lam, Kristine Wai Fun, Lambrechts, Michiel, Lammer, Helmut, Lanza, Antonino Francesco, Lanzafame, Alessandro, Martiz, Mariel Lares, Laskar, Jacques, Latter, Henrik, Lavanant, Tony, Lawrenson, Alastair, Lazzoni, Cecilia, Lebre, Agnes, Lebreton, Yveline, Etangs, Alain Lecavelier des, Lee, Katherine, Leinhardt, Zoe, Leleu, Adrien, Lendl, Monika, Leto, Giuseppe, Levillain, Yves, Libert, Anne-Sophie, Lichtenberg, Tim, Ligi, Roxanne, Lignieres, Francois, Lillo-Box, Jorge, Linsky, Jeffrey, Liu, John Scige, Loidolt, Dominik, Longval, Yuying, Lopes, Ilídio, Lorenzani, Andrea, Ludwig, Hans-Guenter, Lund, Mikkel, Lundkvist, Mia Sloth, Luri, Xavier, Maceroni, Carla, Madden, Sean, Madhusudhan, Nikku, Maggio, Antonio, Magliano, Christian, Magrin, Demetrio, Mahy, Laurent, Maibaum, Olaf, Malac-Allain, LeeRoy, Malapert, Jean-Christophe, Malavolta, Luca, Maldonado, Jesus, Mamonova, Elena, Manchon, Louis, Manjón, Andres, Mann, Andrew, Mantovan, Giacomo, Marafatto, Luca, Marconi, Marcella, Mardling, Rosemary, Marigo, Paola, Marinoni, Silvia, Marques, rico, Marques, Joao Pedro, Marrese, Paola Maria, Marshall, Douglas, Perales, Silvia Martínez, Mary, David, Marzari, Francesco, Masana, Eduard, Mascher, Andrina, Mathis, Stéphane, Mathur, Savita, Vodopivec, Iris Martín, Figueiredo, Ana Carolina Mattiuci, Maxted, Pierre F. L., Mazeh, Tsevi, Mazevet, Stephane, Mazzei, Francesco, McCormac, James, McMillan, Paul, Menou, Lucas, Merle, Thibault, Meru, Farzana, Mesa, Dino, Messina, Sergio, Mészáros, Szabolcs, Meunier, Nadége, Meunier, Jean-Charles, Micela, Giuseppina, Michaelis, Harald, Michel, Eric, Michielsen, Mathias, Michtchenko, Tatiana, Miglio, Andrea, Miguel, Yamila, Milligan, David, Mirouh, Giovanni, Mitchell, Morgan, Moedas, Nuno, Molendini, Francesca, Molnár, László, Mombarg, Joey, Montalban, Josefina, Montalto, Marco, Monteiro, Mário J. P. F. G., Sánchez, Francisco Montoro, Morales, Juan Carlos, Morales-Calderon, Maria, Morbidelli, Alessandro, Mordasini, Christoph, Moreau, Chrystel, Morel, Thierry, Morello, Guiseppe, Morin, Julien, Mortier, Annelies, Mosser, Beno t, Mourard, Denis, Mousis, Olivier, Moutou, Claire, Mowlavi, Nami, Moya, Andrés, Muehlmann, Prisca, Muirhead, Philip, Munari, Matteo, Musella, Ilaria, Mustill, Alexander James, Nardetto, Nicolas, Nardiello, Domenico, Narita, Norio, Nascimbeni, Valerio, Nash, Anna, Neiner, Coralie, Nelson, Richard P., Nettelmann, Nadine, Nicolini, Gianalfredo, Nielsen, Martin, Niemi, Sami-Matias, Noack, Lena, Noels-Grotsch, Arlette, Noll, Anthony, Norazman, Azib, Norton, Andrew J., Nsamba, Benard, Ofir, Aviv, Ogilvie, Gordon, Olander, Terese, Olivetto, Christian, Olofsson, Göran, Ong, Joel, Ortolani, Sergio, Oshagh, Mahmoudreza, Ottacher, Harald, Ottensamer, Roland, Ouazzani, Rhita-Maria, Paardekooper, Sijme-Jan, Pace, Emanuele, Pajas, Miriam, Palacios, Ana, Palandri, Gaelle, Palle, Enric, Paproth, Carsten, Parro, Vanderlei, Parviainen, Hannu, Granado, Javier Pascual, Passegger, Vera Maria, Pastor-Morales, Carmen, Pätzold, Martin, Pedersen, May Gade, Hidalgo, David Pena, Pepe, Francesco, Pereira, Filipe, Persson, Carina M., Pertenais, Martin, Peter, Gisbert, Petit, Antoine C., Petit, Pascal, Pezzuto, Stefania, Pichierri, Gabriele, Pietrinferni, Adriano, Pinheiro, Fernando, Pinsonneault, Marc, Plachy, Emese, Plasson, Philippe, Plez, Bertrand, Poppenhaeger, Katja, Poretti, Ennio, Portaluri, Elisa, Portell, Jordi, de Mello, Gustavo Frederico Porto, Poyatos, Julien, Pozuelos, Francisco J., Moroni, Pier Giorgio Prada, Pricopi, Dumitru, Prisinzano, Loredana, Quade, Matthias, Quirrenbach, Andreas, Reina, Julio Arturo Rabanal, Soares, Maria Cristina Rabello, Raimondo, Gabriella, Rainer, Monica, Rodón, Jose Ramón, Ramón-Ballesta, Alejandro, Zapata, Gonzalo Ramos, Rätz, Stefanie, Rauterberg, Christoph, Redman, Bob, Redmer, Ronald, Reese, Daniel, Regibo, Sara, Reiners, Ansgar, Reinhold, Timo, Renie, Christian, Ribas, Ignasi, Ribeiro, Sergio, Ricciardi, Thiago Pereira, Rice, Ken, Richard, Olivier, Riello, Marco, Rieutord, Michel, Ripepi, Vincenzo, Rixon, Guy, Rockstein, Steve, Ortiz, José Ramón Rodón, Rodríguez, María Teresa Rodrigo, Amor, Alberto Rodríguez, Díaz, Luisa Fernanda Rodríguez, Garcia, Juan Pablo Rodriguez, Rodriguez-Gomez, Julio, Roehlly, Yannick, Roig, Fernando, Rojas-Ayala, Bárbara, Rolf, Tobias, Rørsted, Jakob Lysgaard, Rosado, Hugo, Rosotti, Giovanni, Roth, Olivier, Roth, Markus, Rousseau, Alex, Roxburgh, Ian, Roy, Fabrice, Royer, Pierre, Ruane, Kirk, Mastropasqua, Sergio Rufini, de Galarreta, Claudia Ruiz, Russi, Andrea, Saar, Steven, Saillenfest, Melaine, Salaris, Maurizio, Salmon, Sebastien, Saltas, Ippocratis, Samadi, Réza, Samadi, Aunia, Samra, Dominic, da Silva, Tiago Sanches, Carrasco, Miguel Andrés Sánchez, Santerne, Alexandre, Pé, Amaia Santiago, Santoli, Francesco, Santos, ngela R. G., Mesa, Rosario Sanz, Sarro, Luis Manuel, Scandariato, Gaetano, Schäfer, Martin, Schlafly, Edward, Schmider, François-Xavier, Schneider, Jean, Schou, Jesper, Schunker, Hannah, Schwarzkopf, Gabriel Jörg, Serenelli, Aldo, Seynaeve, Dries, Shan, Yutong, Shapiro, Alexander, Shipman, Russel, Sicilia, Daniela, sanmartin, Maria Angeles Sierra, Sigot, Axelle, Silliman, Kyle, Silvotti, Roberto, Simon, Attila E., Napoli, Ricardo Simoyama, Skarka, Marek, Smalley, Barry, Smiljanic, Rodolfo, Smit, Samuel, Smith, Alexis, Smith, Leigh, Snellen, Ignas, Sódor, Ádám, Sohl, Frank, Solanki, Sami K., Sortino, Francesca, Sousa, Sérgio, Southworth, John, Souto, Diogo, Sozzetti, Alessandro, Stamatellos, Dimitris, Stassun, Keivan, Steller, Manfred, Stello, Dennis, Stelzer, Beate, Stiebeler, Ulrike, Stokholm, Amalie, Storelvmo, Trude, Strassmeier, Klaus, Strøm, Paul Anthony, Strugarek, Antoine, Sulis, Sophia, vanda, Michal, Szabados, László, Szabó, Róbert, Szabó, Gyula M., Szuszkiewicz, Ewa, Talens, Geert Jan, Teti, Daniele, Theisen, Tom, Thévenin, Frédéric, Thoul, Anne, Tiphene, Didier, Titz-Weider, Ruth, Tkachenko, Andrew, Tomecki, Daniel, Tonfat, Jorge, Tosi, Nicola, Trampedach, Regner, Traven, Gregor, Triaud, Amaury, Trønnes, Reidar, Tsantaki, Maria, Tschentscher, Matthias, Turin, Arnaud, Tvaruzka, Adam, Ulmer, Bernd, Ulmer-Moll, Solène, Ulusoy, Ceren, Umbriaco, Gabriele, Valencia, Diana, Valentini, Marica, Valio, Adriana, Guijarro, Ángel Luis Valverde, Van Eylen, Vincent, Van Grootel, Valerie, van Kempen, Tim A., Van Reeth, Timothy, Van Zelst, Iris, Vandenbussche, Bart, Vasiliou, Konstantinos, Vasilyev, Valeriy, de Mascarenhas, David Vaz, Vazan, Allona, Nunez, Marina Vela, Velloso, Eduardo Nunes, Ventura, Rita, Ventura, Paolo, Venturini, Julia, Trallero, Isabel Vera, Veras, Dimitri, Verdugo, Eva, Verma, Kuldeep, Vibert, Didier, Martinez, Tobias Vicanek, Vida, Krisztián, Vigan, Arthur, Villacorta, Antonio, Villaver, Eva, Aparicio, Marcos Villaverde, Viotto, Valentina, Vorobyov, Eduard, Vorontsov, Sergey, Wagner, Frank W., Walloschek, Thomas, Walton, Nicholas, Walton, Dave, Wang, Haiyang, Waters, Rens, Watson, Christopher, Wedemeyer, Sven, Weeks, Angharad, Weingrill, Jörg, Weiss, Annita, Wendler, Belinda, West, Richard, Westerdorff, Karsten, Westphal, Pierre-Amaury, Wheatley, Peter, White, Tim, Whittaker, Amadou, Wickhusen, Kai, Wilson, Thomas, Windsor, James, Winter, Othon, Winther, Mark Lykke, Winton, Alistair, Witteck, Ulrike, Witzke, Veronika, Woitke, Peter, Wolter, David, Wuchterl, Günther, Wyatt, Mark, Yang, Dan, Yu, Jie, Sanchez, Ricardo Zanmar, Osorio, María Rosa Zapatero, Zechmeister, Mathias, Zhou, Yixiao, Ziemke, Claas, Zwintz, Konstanze

PLATO (PLAnetary Transits and Oscillations of stars) is ESA's M3 mission designed to detect and characterise extrasolar planets and perform asteroseismic monitoring of a large number of stars. PLATO will detect small planets (down to <2 R_(Earth)) ar

Externí odkaz: http://arxiv.org/abs/2406.05447

Towards Improved Semiconductor Defect Inspection for high-NA EUVL based on SEMI-SuperYOLO-NAS

Autor: Chen, Ying-Lin, Deforce, Jacob, De Ridder, Vic, Dey, Bappaditya, Blanco, Victor, Halder, Sandip, Leray, Philippe

Due to potential pitch reduction, the semiconductor industry is adopting High-NA EUVL technology. However, its low depth of focus presents challenges for High Volume Manufacturing. To address this, suppliers are exploring thinner photoresists and new

Externí odkaz: http://arxiv.org/abs/2404.05862