Sensitive capacitive pressure sensors based on graphene membrane arrays.

Autor: Šiškins M; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Lee M; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Wehenkel D; Applied Nanolayers B.V., Feldmannweg 17, 2628 CT Delft, The Netherlands., van Rijn R; Applied Nanolayers B.V., Feldmannweg 17, 2628 CT Delft, The Netherlands., de Jong TW; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Renshof JR; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Hopman BC; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Peters WSJM; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Davidovikj D; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., van der Zant HSJ; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands., Steeneken PG; Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands.; Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, 2628 CD Delft, The Netherlands.

Publikováno v: Microsystems & nanoengineering [Microsyst Nanoeng] 2020 Nov 16; Vol. 6, pp. 102. Date of Electronic Publication: 2020 Nov 16 (Print Publication: 2020).