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Autor:
Engelen, Johannes Bernardus Charles, de Boer, Hans L., de Boer, Hylco, Beekman, Jethro G., Fortgens, Laurens C., de Graaf, Derk B., Vocke, Sander, Abelmann, Leon
Publikováno v:
Journal of microelectromechanical systems, 21(2), 262-269. IEEE
The Micronium is a musical instrument fabricated from silicon using microelectromechanical system (MEMS) technology. It is—to the best of our knowledge—the first musical micro-instrument fabricated using MEMS technology, where the actual sound is