Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication

Autor: Marta Maria Kluba, Jian Li, Katja Parkkinen, Marcus Louwerse, Jaap Snijder, Ronald Dekker

Publikováno v: Micromachines, Vol 12, Iss 4, p 414 (2021)

Several Silicon on Insulator (SOI) wafer manufacturers are now offering products with customer-defined cavities etched in the handle wafer, which significantly simplifies the fabrication of MEMS devices such as pressure sensors. This paper presents a

Externí odkaz: https://doaj.org/article/f3dc54066ccf491b82c23ad6755919ee

Novel method of alignment to buried cavities in cavity-SOI wafers for advanced MEMS devices

Autor: Lijc Lambert Bergers, Christopher Mountain, Marta Kluba, Jaap Snijder, Ronald Dekker

Publikováno v: Micro and Nano Engineering, Vol 5, Iss, Pp-(2019)
Micro and Nano Engineering, 5:100043. Elsevier
Micro and Nano Engineering, 5
Micro and Nano Engineering

Accurate alignment between the cavities in cavity-SOI (c-SOI) wafers and lithography on the wafer surface is essential to advanced MEMS production. Existing alignment methods are well defined, but often require specialized equipment or costly softwar

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c9d249cdcb70df20ea93f337c48455d4
http://www.sciencedirect.com/science/article/pii/S2590007219300292

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High Voltage Excitation and Nonlinear Transmission of a 16 MHz AlN-Based Piezoelectric Micro-Machined Ultrasonic Transducer

Autor: Hao Yu, Malika Toubai, Denis Remiens, Lynda Chehami, Le-Ming He, Jinghui Xu, Wen-Juan Liu, Junyan Ren, Weijiang Xu, Yuandong Gu, Xubo Wang, Nikolay Smagin, Jia Zhou

Publikováno v: 2018 IEEE International Ultrasonics Symposium (IUS)
2018 IEEE International Ultrasonics Symposium (IUS), Oct 2018, Kobe, Japan. IEEE, ISBN 978-1-5386-3426-4 ; e-ISBN 978-1-5386-3425-7, paper P1-A12-4, 1037-1040, Proceedings of IEEE International Ultrasonics Symposium, IUS 2018. ⟨10.1109/ULTSYM.2018.8579892⟩

International audience; This paper reports the performance of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer (PMUT) under high voltage excitation and determines its limit of power transmission capability. The proposed PMUT arra

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::6ca4c25c8931ba6c54771214b8a3caa9
https://doi.org/10.1109/ultsym.2018.8579892