Zobrazeno 1 - 10
of 48
pro vyhledávání: '"Zusing Yang"'
Autor:
Zusing Yang, 楊儒興
95
Nanomaterials hold great potential to be photovoltaic, electronic, magnetic, and biosensing materials because their unique electric, magnetic, and optical properties. This thesis demonstrated several synthetic strategies for the preparation o
Nanomaterials hold great potential to be photovoltaic, electronic, magnetic, and biosensing materials because their unique electric, magnetic, and optical properties. This thesis demonstrated several synthetic strategies for the preparation o
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/53292837167690385427
Autor:
Zusing Yang, 楊儒興
91
Room Temperature Ionic Liquids (RTILs) have been widely employed as novel solvents for many applications, such as liquid/liquid extraction, chromatography, synthesis, catalysis etc. This is because of their unique chemical and physical proper
Room Temperature Ionic Liquids (RTILs) have been widely employed as novel solvents for many applications, such as liquid/liquid extraction, chromatography, synthesis, catalysis etc. This is because of their unique chemical and physical proper
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/34913491839196207332
Autor:
Shao-Lou Jheng, Jyunhong Wu, Zusing Yang, Yuan-Chieh Chiu, Ming-Tsung Wu, Hong-Ji Lee, Nan-Tzu Lian, Tahone Yang, Kuang-Chao Chen, Chih-Yuan Lu
Publikováno v:
2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Autor:
Nan-Tzu Lian, Tahone Yang, Yao-Yuan Chang, Zusing Yang, Hong-Ji Lee, Chih-Yuan Lu, Kuang-Chao Chen, Ming-Tsung Wu
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
The challenges of oval-shaped silicon dioxide and polysilicon (OP)-layer hole etching, including shape deformation, local arcing, and adjacent hole bridging are reported. We explore the shape deformation evolution step by step and point out that wigg
Autor:
Zusing Yang, Kuang-Chao Chen, Yao-Yuan Chang, Hong-Ji Lee, Ming-Tsung Wu, Chih-Yuan Lu, Nan-Tzu Lian, Tahone Yang
Publikováno v:
2020 31st Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
For silicon selective epitaxy growth (Si-SEG) process, an ex situ pre-epitaxial treatment (PET) is applied in order to remove the damaged layer and impurities. In this work, we observe asymmetric Si recess formed at the bottom of vertical channel (VC
Autor:
Arase Takao, Hong-Ji Lee, Chih-Yuan Lu, Yuan-Chieh Chiu, Masahito Mori, Kuang-Chao Chen, Zusing Yang, Yinhwa Cheng, Hayato Watanabe, Li-Ian Wu, Sheng-Yuan Chang, Nan-Tzu Lian, Tahone Yang
Publikováno v:
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Dependency of asymmetric etched profiles on open-ratio and pattern-size within the wafer was studied in a magnetic Very High Frequency (VHF) Plasma etching system for high aspect-ratio multiple alternating layers of silicon oxide/polysilicon (OP) etc
Autor:
Hong-Ji Lee, Chih-Yuan Lu, Zusing Yang, Sheng-Yuan Chang, Yuan-Chieh Chiu, Li-Lan Wu, Nan-Tzu Lian, Tahone Yang, Kuang-Chao Chen
Publikováno v:
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Subtle Ti/TiN bump defects are observed after thermal annealing in the development step of a back-end-of-line (BEOL) via metallization. It disturbs the endpoint detection of a sequential tungsten (W) chemical-mechanical planarization (CMP) process an
Autor:
Sheng-Yuan Chang, Min-Feng Hung, Hong-Ji Lee, Chih-Yao Lin, Nan-Tzu Lian, Tahone Yang, Chih-Yuan Lu, Kuo-Pin Chang, Kuang-Chao Chen, Zusing Yang
Publikováno v:
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
We present several efforts for arcing reduction during high aspect ratio etching. Strategies including pulsing etching adjustments, ex situ multi-cyclic etch approach, flush step incorporation, E-chuck voltage operation, cap material, etc. are explor
Autor:
Hong-Ji Lee, Chih-Yuan Lu, Sheng-Yuan Chang, Chih-Yao Lin, Nan-Tzu Lian, Tahone Yang, Kuang-Chao Chen, Zusing Yang, Chieh Lo, Wei-Chen Chen
Publikováno v:
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Publikováno v:
Journal of Materials, Vol 2013 (2013)
We have prepared and employed TiO2/CdZnS/CdZnSe electrodes for photochemical water splitting. The TiO2/CdZnS/CdZnSe electrodes consisting of sheet-like CdZnS/CdZnSe nanostructures (8–10 μm in length and 5–8 nm in width) were prepared through che