Effect of the Parameters of Grain Misorientation in Multicrystalline Silicon on the Formation of the SEM Image Contrast.

Autor: Peshcherova, S. M., Chueshova, A. G., Zimin, M. D., Ludina, E. A., Pavlova, L. A., Nepomnyashchikh, A. I., Zubritcky, S. M., Ribyakov, M. Yu., Dovchenko, L. K.

Publikováno v: Journal of Surface Investigation: X-Ray, Synchrotron & Neutron Techniques; Feb2022, Vol. 16 Issue 1, p122-127, 6p