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Publikováno v:
physica status solidi c. 8:2961-2964
Photomodulated reflectance (PMR) measurement techniques are currently used for the monitoring of ultra-shallow junctions. This paper discusses the possibility of applying them to the characterisation of metal layers. A finite element method based com
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fa19159b45553bf5f41b3e718e152422
https://doi.org/10.1002/pssc.201084115
https://doi.org/10.1002/pssc.201084115
