Design considerations in micromachined silicon microphones

Autor: Miao, Jianmin ^*, Lin, Rongming, Chen, Longqing, Zou, Quanbo, Lim, Sin Yee, Seah, Suan Hee

Publikováno v: In Microelectronics Journal 2 January 2002 33(1-2):21-28

Sensitivity-improved silicon condenser microphone with a novel single deeply corrugated diaphragm

Autor: Li, Xinxin ^*, Lin, Rongming, Kek, Huatsoon, Miao, Jianmin, Zou, Quanbo

Publikováno v: In Sensors & Actuators: A. Physical 2001 92(1):257-262

CoMSaT: a single-chip fabrication technique for three-dimensional integrated fluid systems

Autor: Zou, Quanbo ^{a, *}, Wang, Zhenfeng ^a, Lin, Rongming ^a, Pang, Jiangtao ^b, Tan, Zhimin ^b, Qian, Xin ^b, Liu, Litian ^b, Li, Zhijian ^b

Publikováno v: In Sensors & Actuators: A. Physical 1999 72(2):115-124

Design considerations in micromachined silicon microphones.

Autor: Miao, Jianmin, Lin, Rongming, Chen, Longqing, Zou, Quanbo, Lim, Sin Y., Seah, Suan H.

Publikováno v: Proceedings of SPIE; Nov2000 Part 2, Issue 1, p309-314, 6p

A novel integrated silicon capacitive microphone--floating electrode `electret' microphone (FEEM).

Autor: Zou, Quanbo, Tan, Zhimin, Zhenfeng Wang, Jiangtao Pang, Xin Qian, Qingxin Zhang, Rongming Lin, Sung Yi, Haiqing Gong, Litian Liu, Zhijian Li

Publikováno v: Journal of Microelectromechanical Systems; Jun98, Vol. 7 Issue 2, p224, 11p, 8 Black and White Photographs, 6 Diagrams, 2 Charts, 2 Graphs