Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Ziqiang Qu"'
Publikováno v:
Sensors, Vol 20, Iss 13, p 3652 (2020)
Temperature sensors are one of the most important types of sensors, and are employed in many applications, including consumer electronics, automobiles and environmental monitoring. Due to the need to simultaneously measure temperature and other physi
Externí odkaz:
https://doaj.org/article/f9ba09b7c71841098e0f2d94f04fc292
Publikováno v:
Optics letters. 47(3)
This paper introduces a fiber-optic microelectromechanical system (MEMS) seismic-grade accelerometer that is fabricated by bulk silicon processing using photoresist/silicon dioxide composite masking technology. The proposed sensor is a silicon flexur
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::01b4b63bebed8e716c0d1b48f277781a
https://pubmed.ncbi.nlm.nih.gov/35103716
https://pubmed.ncbi.nlm.nih.gov/35103716