Výsledky vyhledávání - "Zih-Ying Fu"

AI-guided OCD metrology for single HAR sub-micron via measurement

Autor: Fu-Sheng Yang, Zih-Ying Fu, Liang-Chia Chen

Publikováno v: Metrology, Inspection, and Process Control XXXVII.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::d3e039ed6157d83d5a050a8625864913
https://doi.org/10.1117/12.2658279

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Artificial-neural-network-assisted DUV scatterometry for OCD on HAR sub-micron structures

Autor: Zih-Ying Fu, Wei-Hsin Chein, Fu-Sheng Yang, Liang-Chia Chen

Publikováno v: Metrology, Inspection, and Process Control XXXVII.

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::30e694fd98ef22cfd753d7bc5d437a89
https://doi.org/10.1117/12.2657642

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