Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Zhu Shi-Qiu"'
Publikováno v:
Chinese Physics Letters. 19:1329-1332
We present a novel contactless and nondestructive method called the surface electron beam induced voltage (SEBIV) method for characterizing semiconductor materials and devices. The SEBIV method is based on the detection of the surface potential induc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::40e0b4b235d5ba9ff36a93f489ced8a1
https://doi.org/10.1088/0256-307x/19/9/335
https://doi.org/10.1088/0256-307x/19/9/335
Publikováno v:
Russian Microelectronics. 30:207-218
The potentialities of three techniques for detecting signals from barrier structures in a scanning electron microscope are discussed. All the methods are virtually contactless; that is, it is only required that the chips are grounded. The relaxation
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc9386e5a13506c25fd55a0851023721
https://doi.org/10.1023/a:1011336726819
https://doi.org/10.1023/a:1011336726819