Zobrazeno 1 - 10
of 32
pro vyhledávání: '"Zhong-geng Ling"'
Publikováno v:
International Journal of Computational Engineering Science. Sep2003, Vol. 4 Issue 3, p529-532. 4p. 3 Black and White Photographs, 2 Graphs.
Autor:
Zhong-geng Ling, Kun Lian
Publikováno v:
Microsystem Technologies. 16:405-410
In contact UV lithography, a pair of cantilever beams fabricated by two inclined exposures at ±45° in SU-8 using a single mask will form a connected end on the top of SU-8 layer. These beams made of SU-8 with fixed-end have been used as optical fib
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3696f1646602a404436759861b39455e
https://doi.org/10.1007/s00542-009-0929-8
https://doi.org/10.1007/s00542-009-0929-8
Publikováno v:
Microsystem Technologies. 15:429-435
The optic alignment module containing out-of-plane 3D micro lenses, and micro optic fiber holders have been fabricated using tilted UV lithography technique in water with SU-8 photoresist (Ling and Lian in Proc SPIE 4979:402–409, 2007). Each holder
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6e1e08863c7b315821ba3c287b5c7224
https://doi.org/10.1007/s00542-008-0714-0
https://doi.org/10.1007/s00542-008-0714-0
Autor:
Kun Lian, Jost Goettert, Min Zhang, Zhengchun Peng, Zhong-geng Ling, Chang-geng Liu, Josef Hormes, M. Tondra
Publikováno v:
Journal of Microelectromechanical Systems. 15:708-716
A novel approach to integrate densely packed CMOS devices with three-dimensional (3-D) microfluidic systems created at the wafer level using low temperature processes is introduced. The approach is based on low temperature (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::807cff59de6be202fd20d65c52b866c7
https://doi.org/10.1109/jmems.2006.876793
https://doi.org/10.1109/jmems.2006.876793
Autor:
Zhong Geng Ling, Kun Lian
Publikováno v:
Microsystem Technologies. 13:245-251
Out-of-plane microlenses and microoptical fiber holder are two of the most important components for building an integrated microoptic system with a precise alignment accuracy. In this paper, a simple and convenient method to fabricate these component
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::72fb5dd7fa2df45a2df3f8f9e85e7a6d
https://doi.org/10.1007/s00542-006-0175-2
https://doi.org/10.1007/s00542-006-0175-2
Publikováno v:
Microsystem Technologies. 13:259-264
Electroplated nickel is the main material used in LIGA technique for fabricating MicroElectroMechanical System (MEMS) components. This paper presents the recent results regarding LIGA Ni material property enhancement at Center for Advanced Microstruc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::087cf163cf01fc7ce3889eeeed95e272
https://doi.org/10.1007/s00542-006-0195-y
https://doi.org/10.1007/s00542-006-0195-y
Autor:
Zhong Geng Ling, Yohannes M. Desta, Yoonyoung Jin, Varshni Singh, Jost Goettert, Proyag Datta
Publikováno v:
Journal of Physics: Conference Series. 34:912-918
Since 1995 CAMD has been offering exposure services, so called print shop for a variety of users interested in making precision High-Aspect-Ratio Microstructures (HARMST) for various application. Services have been expanded beyond only the print shop
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::19fd38e8f0625a89e98314596d7581e0
https://doi.org/10.1088/1742-6596/34/1/151
https://doi.org/10.1088/1742-6596/34/1/151
Autor:
Tao Wang, Kevin W. Kelly, D. Hensley, R.M. Lienau, A. McCandless, Zhong-geng Ling, Yohannes M. Desta
Publikováno v:
Journal of Microelectromechanical Systems. 14:400-409
This paper describes a process to fabricate monolithic multilevel high-aspect-ratio microstructures (HARMs) for ferromagnetic devices built on silicon wafers using aligned X-ray lithography in conjunction with electrodeposition. Two X-ray masks were
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::00976d3306a279d5fe4560248e66ca40
https://doi.org/10.1109/jmems.2004.839339
https://doi.org/10.1109/jmems.2004.839339
Publikováno v:
International Journal of Computational Engineering Science. :533-536
In this work, an electroplated Ni material made from sulfuric acid-based plating solution has been studied. Differential scanning calorimetry (DSC) technique was used to study the stability of plated Ni at elevated temperatures. Transmission electron
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7aff8f167e78031834543c79963baae8
https://doi.org/10.1142/s1465876303001691
https://doi.org/10.1142/s1465876303001691
Publikováno v:
Microsystem Technologies. 9:119-122
Many MEMS applications require multi-level microstructures in which two or more levels have to be aligned to each other in the processing. A passive alignment method based on a mechanical registration concept utilizing reference posts has been descri
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9d2299d5e7947ecca493301000814bab
https://doi.org/10.1007/s00542-002-0214-6
https://doi.org/10.1007/s00542-002-0214-6