Zobrazeno 1 - 10
of 26
pro vyhledávání: '"Zhihu Ruan"'
Publikováno v:
Micromachines, Vol 13, Iss 6, p 913 (2022)
Free-form microhemispherical shell resonators have the advantages of high quality factor and mass production. The shape of microhemispherical shells created via this process is based on a single mold and is difficult to adjust, which affects the reso
Externí odkaz:
https://doaj.org/article/b8a5d385ece54ea1b83f5f35cae71ddb
Publikováno v:
Journal of Microelectromechanical Systems. 32:16-28
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0bd79c4c75900f9b5191b814e231132b
https://doi.org/10.1109/jmems.2022.3228268
https://doi.org/10.1109/jmems.2022.3228268
Publikováno v:
IEEE Sensors Journal. 22:15802-15816
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::597663294a7ffe08b11228a13b355c41
https://doi.org/10.1109/jsen.2022.3188287
https://doi.org/10.1109/jsen.2022.3188287
Publikováno v:
IEEE Sensors Journal. 22:13945-13957
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1031db7eee5a5f6bc35632ae643ae63b
https://doi.org/10.1109/jsen.2022.3181302
https://doi.org/10.1109/jsen.2022.3181302
Publikováno v:
Micromachines, Vol 11, Iss 2, p 210 (2020)
An automatic mode-matching method for MEMS (Micro-electromechanical Systems) disk resonator gyroscopes (DRGs) based on virtual Coriolis force is presented in this paper. For this mode-matching method, the additional tuning electrodes are not required
Externí odkaz:
https://doaj.org/article/6de283349bce475197560b0319d28ceb
Publikováno v:
IEEE Sensors Journal. 21:23806-23817
This paper presents an in-run mode-matching method for MEMS gyroscopes based on the power symmetry between the sideband signals in the sense mode. The method takes advantage of the power symmetry of both the noise and the Coriolis response within the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::84820335e88e733c128f268a9ccba7d9
https://doi.org/10.1109/jsen.2021.3112915
https://doi.org/10.1109/jsen.2021.3112915
Publikováno v:
IEEE Sensors Journal. 21:14726-14738
Due to the micro hemisphere structure’s small anchor point area, the micro hemisphere resonator and the Pyrex7740 glass electrode substrate are prone to tilt during the assembly process. The inclination angle of the assembly makes the electrode gap
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::366d630a87274ee9d1051616c75b1517
https://doi.org/10.1109/jsen.2021.3072046
https://doi.org/10.1109/jsen.2021.3072046
Publikováno v:
Electronics; Volume 11; Issue 15; Pages: 2451
This paper presents the design and simulation of a single-chip integrated MEMS accelerometer gyroscope by integrating a Coriolis vibratory ring gyroscope and a differential resonant accelerometer into one single-chip structure, measuring both the acc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5d69e33437da7f8b88f68cc01e5ec6ea
Publikováno v:
Micromachines, Vol 10, Iss 6, p 378 (2019)
Coriolis vibratory gyroscopes (CVGs) with circular micro-resonators, such as hemispherical, ring, and disk resonators, exhibit excellent performances and have extraordinary potential. This paper discusses a generalized lumped mass model for both 3D a
Externí odkaz:
https://doaj.org/article/6a0fb3b3096d4a0d944b1f1ee547e32b
Publikováno v:
IEEE Sensors Journal. 21:7316-7325
This paper presents an in-run scale factor error compensation for the micro-electro-mechanical system (MEMS) gyroscope without system calibration and data fitting. The causes of three scale factor errors (instability, nonlinearity, and asymmetry) are
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::da15ff7404b3303ddfc1157c7f1d25a1
https://doi.org/10.1109/jsen.2020.3044148
https://doi.org/10.1109/jsen.2020.3044148