Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Zhevlakov, Alexander"'
Autor:
Grishkanich, Alexander, Zhevlakov, Alexander, Kascheev, Sergey, Kujanpaa, Veli, Savinainen, Timo
Publikováno v:
Grishkanich, A, Zhevlakov, A, Kascheev, S, Kujanpaa, V & Savinainen, T 2016, Spatial conversion of excimer laser beam . in Optical Microlithography XXIX ., 97801L, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9780, Optical Microlithography XXIX, San Jose, California, United States, 15/03/16 . https://doi.org/10.1117/12.2219934
The optical attachment for transformation the spatial characteristics of excimer laser has been experimentally investigated. The laser beam of rectangular section with sizes of 3 x 20 mm and divergence of 2 x 5 mrad after passage of an optical attach
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::feafc536d51b25b576feb5fc167649ae
https://cris.vtt.fi/en/publications/9ba779e2-b123-47c6-81fb-9d7418e3ace8
https://cris.vtt.fi/en/publications/9ba779e2-b123-47c6-81fb-9d7418e3ace8
Autor:
Zhevlakov, Alexander P., Grishkanich, A.S., Kascheev, S.V., Gavrilov, Evgenij V., Kujanpää, Veli
Publikováno v:
Zhevlakov, A P, Grishkanich, A S, Kascheev, S V, Gavrilov, E V & Kujanpää, V 2015, Optical attachment for conversion shape and divergence of KrF laser beam . in 4th EOS Conference on Manufacturing and Testing of Optical Components : EOSMTOC 2015 . European Optical Society (EOS), pp. 66-67, 4th EOS Conference on Manufacturing and Testing of Optical Components, EOSMTOC 2015, Munich, Germany, 22/06/15 .
The transformation spatial characteristics of KrF excimer laser output beam was studied. It is shown that a rectangular 3×20mm laser beam with a divergence of 2 ×5 mrad acquired a shape of 20×20mm and a divergence of 5x5mrad after passing this uni
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=355e65625b88::915d6a2a06490e0c0992a07a25382cf4
https://cris.vtt.fi/en/publications/6f609279-1df4-46b9-b139-a80c3acd2bdf
https://cris.vtt.fi/en/publications/6f609279-1df4-46b9-b139-a80c3acd2bdf
Autor:
Grishkanich, Alexander, Zhevlakov, Alexander, Kascheev, Sergey, Polyakov, Vladimir, Sidorov, Igor, Ruzankina, Julia, Yakovlev, Alexey, Mak, Andrey
Publikováno v:
Proceedings of SPIE; 5/19/2016, Vol. 9887, p1-6, 6p, 2 Color Photographs, 2 Graphs
Autor:
Grishkanich, Alexander, Zhevlakov, Alexander, Polyakov, Vadim, Kascheev, Sergey, Sidorov, Igor, Ruzankina, Julia, Yakovlev, Alexey, Mak, Andrey
Publikováno v:
Proceedings of SPIE; 5/19/2016, Vol. 9887, p1-6, 6p, 2 Color Photographs, 1 Diagram, 4 Graphs
Autor:
Gavrilov, Egor, Kirillovsky, Vladimir, Orlov, Peter, Voznesensky, Nikolay, Zhevlakov, Alexander
Publikováno v:
Proceedings of SPIE; Nov2007 Part 2, Issue 1, p66110D-66110D-7, 7p
Publikováno v:
Proceedings of SPIE; Nov2007, Issue 1, p661307-661307-4, 4p
Autor:
Dimakov, Sergei A., Kislitsyn, Boris V., Klimentiev, Sergei I., Zhevlakov, Alexander P., Zhuk, Dmitrii I.
Publikováno v:
Proceedings of SPIE; Nov2005, Issue 1, p170-179, 10p
Autor:
Andreev, Alexander A., Limpouch, Jiri, Voznesensky, N. B., Zhevlakov, Alexander P., Yashin, Vladimir E.
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p128-136, 9p
Publikováno v:
Proceedings of SPIE; Nov2004, Issue 1, p136-144, 9p
Autor:
Popp, Jürgen, Tuchin, Valery V., Matthews, Dennis L., Pavone, Francesco S., Grishkanich, Alexander, Zhevlakov, Alexander, Polyakov, Vadim, Kascheev, Sergey, Sidorov, Igor, Ruzankina, Julia, Yakovlev, Alexey, Mak, Andrey
Publikováno v:
Proceedings of SPIE; April 2016, Vol. 9887 Issue: 1 p98873J-98873J-6, 889864p