Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Zheng-Da Yang"'
Autor:
Rui-Qi Liu, Li-Qiang Zhang, Hui-Da Pan, Yi-Ya Wang, Jin-Yu Li, Xin-Wei Wang, Zheng-Da Yang, Xin-Lu Han, Ri-Yi Lin
Publikováno v:
Petroleum Science (KeAi Communications Co.); Dec2023, Vol. 20 Issue 6, p3887-3896, 10p
Publikováno v:
Ceramics International. 43:12505-12510
A TaN x layer was deposited as a barrier between Cu and a p-type Si-based substrate. Various N 2 flow rates were used during deposition along with a fixed Radio Frequency (RF) power and a fixed Ar-sputtering flow rate. The performance of the various
Autor:
Zheng- da Yang, 楊政達
104
In this study, for apply to the diffusion barrier layer. we investigate the material properties of Amorphous tantalum nitride thin film which is manufacturing by using 4N Titanium target in reactive sputter,different nitrogen flow, RF magnet
In this study, for apply to the diffusion barrier layer. we investigate the material properties of Amorphous tantalum nitride thin film which is manufacturing by using 4N Titanium target in reactive sputter,different nitrogen flow, RF magnet
Externí odkaz:
http://ndltd.ncl.edu.tw/handle/64xn8b
Autor:
Zheng DY; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Zou JL; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Xu H; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Wang T; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Shi YX; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Chen YJ; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Li BY; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Wang YY; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Feng C; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China., Wu M; State Key Laboratory of Pollution Control and Resources Reuse, College of Environmental Science and Engineering, Tongji University, Shanghai 200092, China.
Publikováno v:
Huan jing ke xue= Huanjing kexue [Huan Jing Ke Xue] 2023 Dec 08; Vol. 44 (12), pp. 6801-6810.