Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Zhanji MA"'
Publikováno v:
Medžiagotyra, Vol 30, Iss 2, Pp 149-154 (2024)
This study prepared magnetron-sputtering deposition film on a large-scale curved workpiece with a favorable thickness uniformity using a rectangular target cathode. For a substrate rotation structure with eccentric rotation/revolution composite motio
Externí odkaz:
https://doaj.org/article/9f5c44a1c1aa44ae837707589c32c704
Publikováno v:
AIP Advances, Vol 13, Iss 5, Pp 055221-055221-7 (2023)
The vacuum level in micro-electro-mechanical system devices needs to be achieved and maintained using non-evaporable getter film technology. Zr–Co–RE getter films are deposited by direct current (DC) magnetron sputtering using krypton (Kr) as the
Externí odkaz:
https://doaj.org/article/0c7edbfcd0074a9cb49b8246a0a24faa
Publikováno v:
Materials Research Express, Vol 7, Iss 3, p 036402 (2020)
Zr-Co-RE non-evaporable getter films have excellent gas adsorption performance therefore can be used in vacuum sealed electronic devices. The microstructure of getter films has vital effect on adsorption performance. In this paper, Zr-Co-RE films dep
Externí odkaz:
https://doaj.org/article/a53c34c8c0454f3c82826124507f9915
Publikováno v:
Vacuum. 200:111065
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e2447c2aa739823ed3e23aa7bba4f917
https://doi.org/10.1016/j.vacuum.2022.111065
https://doi.org/10.1016/j.vacuum.2022.111065
Publikováno v:
Materials Research Express. 7:036402
Zr-Co-RE non-evaporable getter films have excellent gas adsorption performance therefore can be used in vacuum sealed electronic devices. The microstructure of getter films has vital effect on adsorption performance. In this paper, Zr-Co-RE films dep
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::187ceee937ac78d8b5515e61a894d635
https://doi.org/10.1088/2053-1591/ab7968
https://doi.org/10.1088/2053-1591/ab7968