Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Zhang Zhiluo"'
Autor:
Shang, Yi, Tang, Ke, Chen, Zhuorui, Zhang, Zhiluo, Deng, Jie, Hu, Yan, Gu, Keyun, Cao, Meng, Wang, Linjun, Huang, Jian
Publikováno v:
In Materials Science in Semiconductor Processing 1 November 2021 134
Autor:
Keyun Gu, Shang Yi, Meng Cao, Ke Tang, Jie Deng, Zhang Zhiluo, Chen Zhuorui, Jian Huang, Yan Hu, Linjun Wang
Publikováno v:
Materials Science in Semiconductor Processing. 134:106040
In recent years, Ga2O3 has attracted extensive attention at home and abroad due to its excellent properties. In this paper, Ta-doped Ga2O3 films were grown on quartz substrates by magnetron sputtering technique. Effects of substrate temperature and s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fec40e423ad5c17b209c783424ea98e1
https://doi.org/10.1016/j.mssp.2021.106040
https://doi.org/10.1016/j.mssp.2021.106040