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pro vyhledávání: '"Zhang Buo-Rui"'
Autor:
Li Guo-Hua, Zong Wan-Hua, Han He-Xiang, Wang Zhao-Ping, Zhang Buo-Rui, Ma Shu-Yi, Qin Guo-Gang, Ma Zhen-Chang
Publikováno v:
Acta Physica Sinica. 47:502
Using a Ge-SiO2 (GSO) composite target with the Ge wafer in the target having percentage areas of 0%,5% and 10%,three types of nanometer Ge particles embedded Si oxide films were deposited on p-type Si substrates by the rf magnetron sputtering techni