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Direct Characterization of Buried Interfaces in 2D/3D Heterostructures Enabled by GeO2Release Layer

Autor: Smyth, Christopher M., Cain, John M., Boehm, Alex, Ohlhausen, James A., Lam, Mila Nhu, Yan, Xiaodong, Liu, Stephanie E., Zeng, Thomas T., Sangwan, Vinod K., Hersam, Mark C., Chou, Stanley S., Ohta, Taisuke, Lu, Tzu-Ming

Publikováno v: ACS Applied Materials & Interfaces; January 2024, Vol. 16 Issue: 2 p2847-2860, 14p

Direct Characterization of Buried Interfaces in 2D/3D Heterostructures Enabled by GeO 2 Release Layer.

Autor: Smyth CM; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Cain JM; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Boehm A; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Ohlhausen JA; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Lam MN; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Yan X; Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States., Liu SE; Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States., Zeng TT; Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States., Sangwan VK; Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States., Hersam MC; Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208, United States.; Department of Chemistry, Northwestern University, Evanston, Illinois 60208, United States.; Department of Electrical and Computer Engineering, Northwestern University, Evanston, Illinois 60208, United States., Chou SS; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Ohta T; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States., Lu TM; Sandia National Laboratories, Albuquerque, New Mexico 87185, United States.; Center for Integrated Nanotechnologies (CINT), Sandia National Laboratories, Albuquerque, New Mexico 87123, United States.

Publikováno v: ACS applied materials & interfaces [ACS Appl Mater Interfaces] 2024 Jan 17; Vol. 16 (2), pp. 2847-2860. Date of Electronic Publication: 2024 Jan 03.