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pro vyhledávání: '"Ze-da Su"'
Publikováno v:
IEEE Access, Vol 12, Pp 70792-70809 (2024)
Magnetron sputtering systems are widely used for depositing industrially important coatings. Research has been conducted to optimize and improve these structures to increase coating effectiveness and target utilization. The paper investigates the eng
Externí odkaz:
https://doaj.org/article/112df6ea100d42a1a8de28c13fd44f8f