Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Zane Marek"'
Publikováno v:
International Symposium for Testing and Failure Analysis.
This paper describes the detection range of two failure site localization methods developed by the authors. One method, known as the absorbed current image (AEI) technique, is ideally suited for analyzing test element group interconnects on a huge sc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::deeeaa53bca3dab5db2914f0c747157d
https://doi.org/10.31399/asm.cp.istfa2007p0188
https://doi.org/10.31399/asm.cp.istfa2007p0188
Autor:
Zane Marek, Alan S. Parkes
Publikováno v:
SPIE Proceedings.
Defect Scatter Analysis (DSA) provides a fast, accurate method for evaluating the random errors made by defect scanners when a wafer is loaded, aligned, scanned, and unloaded multiple times. The DSA tool includes a 200 mm or 300 mm wafer that has a s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::37e01b21df8953abdff3d037ba1a88a3
https://doi.org/10.1117/12.598782
https://doi.org/10.1117/12.598782