Materials processing with intense pulsed ion beams.

Autor: Rej, D. J., Davis, H. A., Olson, J. C., Remnev, G. E., Zakoutaev, A. N., Ryzhkov, V. A., Struts, V. K., Isakov, I. F., Shulov, V. A., Nochevnaya, N. A., Stinnett, R. W., Neau, E. L., Yatsui, K., Jiang, W.

Publikováno v: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 1997, Vol. 15 Issue 3, p1089-1097, 9p