Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Z. Lisa Zhang"'
Publikováno v:
Sensors and Actuators A: Physical. 40:63-70
A single-crystal slhcon, high aspect ratlo, low-temperature process sequence for the fabrlcatlon of suspended rmcroelectromechamcal structures (MEMS) usmg a smgle hthography step and reactwe Ion etching (RIE) IS presented The process IS called SCRJZA
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3f152cb60938a3fdb80ba995177c7216
https://doi.org/10.1016/0924-4247(94)85031-3
https://doi.org/10.1016/0924-4247(94)85031-3
Autor:
Noel C. MacDonald, Z. Lisa Zhang
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 11:2538
An integrated silicon process has been developed to produce self‐aligned gated field emitters on suspended and movable single‐crystal silicon beams. The field emitter fabrication process is compatible with an extended version of the single crysta
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8e60d9867121df15e1ffe1a89233521d
https://doi.org/10.1116/1.586662
https://doi.org/10.1116/1.586662