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pro vyhledávání: '"Z. E. Berrada"'
Autor:
Marion Fink, Thomas Glinsner, Z. E. Berrada, R. Jerzy, N. Bogdanski, Freimut Reuther, Hella-Christin Scheer, M. Wissen
Publikováno v:
SPIE Proceedings.
Pattern replication into curable imprint resists by hot embossing offers the opportunity to use the replication after crosslinking as a working-stamp. The replications of a 4” Si stamp into the thermoset imprint polymer mr-I 9000R-XP with a commerc