Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Z. E. Berrada"'
Autor:
Marion Fink, Thomas Glinsner, Z. E. Berrada, R. Jerzy, N. Bogdanski, Freimut Reuther, Hella-Christin Scheer, M. Wissen
Publikováno v:
SPIE Proceedings.
Pattern replication into curable imprint resists by hot embossing offers the opportunity to use the replication after crosslinking as a working-stamp. The replications of a 4” Si stamp into the thermoset imprint polymer mr-I 9000R-XP with a commerc
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a58a01171243badd0d18e22220109856
https://doi.org/10.1117/12.532733
https://doi.org/10.1117/12.532733
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Nov/Dec2012, Vol. 30 Issue 6, p1-5, 5p