Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yvonne Patton"'
Publikováno v:
2006 IEEE International Symposium on Semiconductor Manufacturing.
In this paper, we report detailed studies on process challenges and solutions when super-thick gate DECMOS and thin gate CMOS are integrated together in 0deg on-axis substrate. It has been found that large intra-wafer VT variation (sigma ~ 90 mV) and
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::9dd0cdc902b766e2ffd26749f5cb3cd2
https://doi.org/10.1109/issm.2006.4493130
https://doi.org/10.1109/issm.2006.4493130
Publikováno v:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 25:183
Choice of substrate used for analog complementary metal-oxide-semiconductor (CMOS) technologies impacts device performance and fabrication yields significantly. This study examines the impact of low-angle (
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::faa093f15c6450c9254415d24f287756
https://doi.org/10.1116/1.2406063
https://doi.org/10.1116/1.2406063