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pro vyhledávání: '"Yves L. Janssens"'
Autor:
Henk-Willem Veltkamp, Yves L. Janssens, Meint J. de Boer, Yiyuan Zhao, Remco J. Wiegerink, Niels R. Tas, Joost C. Lötters
Publikováno v:
Micromachines, Vol 13, Iss 11, p 1908 (2022)
In micro-machined micro-electromechanical systems (MEMS), refilled high-aspect-ratio trench structures are used for different applications. However, these trenches often show keyholes, which have an impact on the performance of the devices. In this p
Externí odkaz:
https://doaj.org/article/0696249c50ab453eaba5c142d025a0dd
