Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yves L. Janssens"'
Autor:
Henk-Willem Veltkamp, Yves L. Janssens, Meint J. de Boer, Yiyuan Zhao, Remco J. Wiegerink, Niels R. Tas, Joost C. Lötters
Publikováno v:
Micromachines, Vol 13, Iss 11, p 1908 (2022)
In micro-machined micro-electromechanical systems (MEMS), refilled high-aspect-ratio trench structures are used for different applications. However, these trenches often show keyholes, which have an impact on the performance of the devices. In this p
Externí odkaz:
https://doaj.org/article/0696249c50ab453eaba5c142d025a0dd
Autor:
Veltkamp, Henk-Willem, Janssens, Yves L., de Boer, Meint J., Zhao, Yiyuan, Wiegerink, Remco J., Tas, Niels R., Lötters, Joost C.
Publikováno v:
Micromachines; Nov2022, Vol. 13 Issue 11, p1908, 23p