Výsledky vyhledávání - "Yves Fabien Rody"

Complementary Double Exposure Technique (CODE) solutions to the two-dimensional structures of the 90nm node

Autor: Olivier Toublan, Yorick Trouiller, Pierre Jerome Goirand, Patrick Schiavone, Yves Fabien Rody, S. Manakli

Publikováno v: SPIE Proceedings.

In a recent paper, we proposed a new manufacturable Reticule Enhancement Technique (RET) using two binary masks, called CODE ( Co mplementary D ouble E xposure). We demonstrated the printability of 80nm dense (300nm pitch), semi-dense and isolated li

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::0836b90e835932d3cf95f3e44ecfe747
https://doi.org/10.1117/12.468203

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ArF imaging with off-axis illumination and subresolution assist bars: a compromise between mask constraints and lithographic process constraints

Autor: Yorick Trouiller, Corinne Miramond, Pierre-Jerome Goirand, J. Serrand, Yves Fabien Rody, S. Manakli

Publikováno v: SPIE Proceedings.

The insertion point for the first scattering bar is a key point in the development of a process using assist features, because this semi dense feature will determine the overall depth of focus of the process. A study of the parameters, which influenc

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8aeb359ecd613701beb1fb8372dc77f0
https://doi.org/10.1117/12.474539

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