Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Yuusuke Kittaka"'
Publikováno v:
IEEE Transactions on Plasma Science. 43:1758-1768
To understand the essentiality of the electron energy distribution function in a low-pressure discharge plasma, an experimental study is carried out on the diagnostics of microwave discharge hydrogen plasma with its discharge pressure $\sim 1$ torr i