Zobrazeno 1 - 10
of 16
pro vyhledávání: '"Yutaka NAKAMITSU"'
Publikováno v:
Mechanical Engineering Journal, Vol 2, Iss 1, Pp 14-00462-14-00462 (2015)
Magnetostrictive materials of the Fe-Ni-Cr ternary system for sensitivity enhancement of force sensors were searched by using a combinatorial method. Magnetostrictive materials for force sensors require large magnetostriction, high relative permeabil
Externí odkaz:
https://doaj.org/article/a2016b4d332c4519ba23d40990f34e06
Publikováno v:
IEEJ Transactions on Sensors and Micromachines. 133:342-347
SUMMARY Combinatorial search is one of the useful methods that could search for optimal composition of alloy materials or novel alloy materials. Combinatorial sputtering provides sample group (library) having different compositions in a limited place
Publikováno v:
IEICE Electronics Express. 9:403-409
Novel high-frequency bending fatigue test method for sputtered metallic thin films using PVDF microactuator is proposed. Thin film titanium specimen as an example and a PVDF piezoelectric microactuator are fabricated. The specimen is stamped on this
Publikováno v:
MHS
In this paper, we proposed a new fabrication method of thick film structure which has rectangular cross-sectional shape. This fabrication method utilized a new sputtering jig consisting of substrate and spacer units. The surface level of spacer unit
Publikováno v:
MHS
Combinatorial New-Facing Targets Sputtering (combi-NFTS) is one of the co-sputtering method applied to the combinatorial method. Combi-NFTS could easily control the composition range by changing the distance from substrate to targets. Furthermore com
Growth of a sputtered Ta2O5/ZnO film and its application to an ion-sensitive field-effect transistor
Autor:
Yutaka Nakamitsu, Kazuto Koike, Mitsuaki Yano, Sadao Kadokura, Toshihiko Maemoto, Kazuya Mukai, Shigehiko Sasa, Takayuki Onaka
Publikováno v:
2013 IEEE International Meeting for Future of Electron Devices, Kansai.
High-performance and transparent ion-sensitive field-effect transistor (ISFET) was prepared by a facing-target type sputtering method using the combination of a ZnO layer for the channel and a high-k Ta2O5 layer for the gate insulator. The ISFET show
Publikováno v:
MRS Proceedings. 1427
Combinatorial sputtering is one of the useful methods that can be used to search for optimal composition of alloy materials or for new alloy materials. To search materials more efficiently, it is required that compositions and their distribution on s
Publikováno v:
The Proceedings of Mechanical Engineering Congress, Japan. 2014:J2220202
Publikováno v:
The Proceedings of Mechanical Engineering Congress, Japan. 2014:J2220102
Publikováno v:
The Proceedings of Mechanical Engineering Congress, Japan. 2013:J212021-1