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Autor:
Takashi Nishiyama, Tatsuo Ishijima, Yu Arai, Yousuke Goto, Hideo Horibe, Seiji Takahashi, Masaru Hori, Kenji Ishikawa, Akihiko Kono, Masashi Yamamoto, Yusuke Noto
Publikováno v:
Thin Solid Films. 575:12-16
The relationship between the chemical structure of PMMA-type polymers and the removal rate by hydrogen radicals was examined. Hydrogen radicals are known to have superior reduction ability and can be generated by decomposing H 2 on hot-wire surfaces.