Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Yushin Nishihara"'
Publikováno v:
Chemical Physics Letters. 514:26-28
The production of PH 3 from red phosphorus and the atomic hydrogen formed in the catalytic decomposition of H 2 on heated W surfaces was confirmed. The absolute density of the PH 3 could be as high as 10 13 cm −3 ; the density was proportional to H
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::0eb82fb1f953716045edf45238e3bd21
https://doi.org/10.1016/j.cplett.2011.08.014
https://doi.org/10.1016/j.cplett.2011.08.014
Autor:
Hironobu Umemoto, Hiroshi Nishiyama, Yusaku Kashiwagi, Yasunobu Inoue, Kanji Yasui, Takuma Ishikawa, Mitsuru Ushijima, Yushin Nishihara
Publikováno v:
Japanese Journal of Applied Physics. 52:096701
The reaction of Zn(CH3)2 and activated H2O produced in a reaction of H2 and O2 on a Pt catalyst and effused from a nozzle was examined both experimentally and theoretically. This reaction has been shown to be effective in the preparation of high-qual
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a47d8a863627c14692f872dff7141d3a
http://hdl.handle.net/10297/7411
http://hdl.handle.net/10297/7411
Publikováno v:
Japanese Journal of Applied Physics. 51:086501
The catalytic decomposition processes of PH3 on heated tungsten surfaces were studied to clarify the mechanisms governing phosphorus doping into silicon substrates. Mass spectrometric measurements show that PH3 can be decomposed by more than 50% over
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::8500ac82021e077ba5df33824e1d36f1
https://doi.org/10.7567/jjap.51.086501
https://doi.org/10.7567/jjap.51.086501
Publikováno v:
Japanese Journal of Applied Physics. 51:086501
The catalytic decomposition processes of PH3 on heated tungsten surfaces were studied to clarify the mechanisms governing phosphorus doping into silicon substrates. Mass spectrometric measurements show that PH3 can be decomposed by more than 50% over
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1f9830121730bbc1f710b9a5a44e029e
https://doi.org/10.1143/jjap.51.086501
https://doi.org/10.1143/jjap.51.086501