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Protective radiolucent aluminium oxide coatings for beryllium X-ray optics.

Autor: Yurkevich, Oksana¹, Maksimova, Ksenia¹, Goikhman, Alexander¹, Grunin, Alexey¹, Prokopovich, Pavel¹, Tyurin, Alexander², Medvedskaya, Polina³, Lyatun, Ivan³, Snigireva, Irina⁴, Snigirev, Anatoly³

Publikováno v: Journal of Synchrotron Radiation. Jul2017, Vol. 24 Issue 4, p775-780. 5p.

Recommended reading list of early publications on atomic layer deposition-Outcome of the 'Virtual Project on the History of ALD'

Autor: Ahvenniemi, Esko, Akbashev, Andrew R., Ali, Saima, Bechelany, Mikhael, Berdova, Maria, Boyadjiev, Stefan, Cameron, David C., Chen, Rong, Chubarov, Mikhail, Cremers, Veronique, Devi, Anjana, Drozd, Viktor, Elnikova, Liliya, Gottardi, Gloria, Grigoras, Kestutis, Hausmann, Dennis M., Hwang, Cheol Seong, Jen, Shih-Hui, Kallio, Tanja, Kanervo, Jaana, Khmelnitskiy, Ivan, Kim, Do Han, Klibanov, Lev, Koshtyal, Yury, Krause, A. Outi I., Kuhs, Jakob, Kaerkkaenen, Irina, Kaariainen, Marja-Leena, Kaariainen, Tommi, Lamagna, Luca, Lapicki, Adam A., Leskela, Markku, Lipsanen, Harri, Lyytinen, Jussi, Malkov, Anatoly, Malygin, Anatoly, Mennad, Abdelkader, Militzer, Christian, Molarius, Jyrki, Norek, Malgorzata, Ozgit-Akgun, Cagla, Panov, Mikhail, Pedersen, Henrik, Piallat, Fabien, Popov, Georgi, Puurunen, Riikka L., Rampelberg, Geert, Ras, Robin H. A., Rauwel, Erwan, Roozeboom, Fred, Sajavaara, Timo, Salami, Hossein, Savin, Hele, Schneider, Nathanaelle, Seidel, Thomas E., Sundqvist, Jonas, Suyatin, Dmitry B., Törndahl, Tobias, van Ommen, J. Ruud, Wiemer, Claudia, Ylivaara, Oili M. E., Yurkevich, Oksana

Atomic layer deposition (ALD), a gas-phase thin film deposition technique based on repeated, self-terminating gas-solid reactions, has become the method of choice in semiconductor manufacturing and many other technological areas for depositing thin c

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=dedup_wf_001::b61ad2530953894e15e6f0bc01534da0
http://urn.kb.se/resolve?urn=urn:nbn:se:uu:diva-316208

On the early history of atomic layer deposition:most significant works and applications

Autor: Aarik, Jaan, Ahvenniemi, Esko, Akbashev, Andrew R., Ali, Saima, Bechelany, Mikhael, Berdova, Maria, Cameron, David, Chekurov, Nikolai, Chubarov, Mikhail, Drozd, Viktor, Elliott, Simon, Gottardi, Gloria, Grigoras, Kestutis, Hwang, Cheol Seong, Junige, Marcel, Kallio, Tanja, Kanervo, Jaana, Khmelnitskiy, Ivan, Koshtyal, Yury, Krause, Outi, Kääriäinen, Marja-Leena, Kääriäinen, Tommi, Lamagna, Luca, Lipsanen, Harri, Lyytinen, Jussi, Malkov, Anatoly, Malygin, Anatoly, Molarius, Jyrki, Norek, Malgorzata, Ozgit-Akgun, Cagla, Panov, Mikhail, Pedersen, Henrik, Piallat, Fabien, Popov, Georgi, Puurunen, Riikka L., Pyymaki-Perros, Alexander, Ras, Robin H. A., Roozeboom, Fred, Sajavaara, Timo, Savin, Hele, Seidel, Thomas E., Sundberg, Pia, Sundqvist, Jonas, Suyatin, Dmitry, Tallarida, Massimo, Törndahl, Tobias, Utriainen, Mikko, van Ommen, J. Ruud, Wächtler, Thomas, Wiemer, Claudia, Ylivaara, Oili M. E., Yurkevich, Oksana

Publikováno v: Aarik, J, Ahvenniemi, E, Akbashev, A R, Ali, S, Bechelany, M, Berdova, M, Cameron, D, Chekurov, N, Chubarov, M, Drozd, V, Elliott, S, Gottardi, G, Grigoras, K, Hwang, C S, Junige, M, Kallio, T, Kanervo, J, Khmelnitskiy, I, Koshtyal, Y, Krause, O, Kääriäinen, M-L, Kääriäinen, T, Lamagna, L, Lipsanen, H, Lyytinen, J, Malkov, A, Malygin, A, Molarius, J, Norek, M, Ozgit-Akgun, C, Panov, M, Pedersen, H, Piallat, F, Popov, G, Puurunen, R L, Pyymaki-Perros, A, Ras, R H A, Roozeboom, F, Sajavaara, T, Savin, H, Seidel, T E, Sundberg, P, Sundqvist, J, Suyatin, D, Tallarida, M, Törndahl, T, Utriainen, M, van Ommen, J R, Wächtler, T, Wiemer, C, Ylivaara, O M E & Yurkevich, O 2016, ' On the early history of atomic layer deposition : most significant works and applications ', 16th International Conference on Atomic Layer Deposition, ALD 2016, Dublin, Ireland, 24/07/16-27/07/16 .

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=355e65625b88::3b2b52ef81afcdd0edebc708b823184f
https://cris.vtt.fi/en/publications/03707523-8c1a-4bbc-8828-d8f850920e09