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pro vyhledávání: '"Yuria Ohkubo"'
Publikováno v:
Applied Optics. 50:53
Air refractive index fluctuation (Δn(air)) is one of the largest uncertainty sources in precision interferometry systems that require a resolution of nanometer order or less. We introduce a method for the active suppression of Δn(air) inside a norm
Publikováno v:
Measurement Science and Technology. 20:125302
In the previous work (Ishige et al 2009 Meas. Sci. Technol. 20 084019), we presented a method of measuring the relative air-refractive-index fluctuation (Δnair) from the laser frequency shift with the measurement uncertainty of order 10−8 using a
Autor:
Yuria Ohkubo, Shohei Kimura, Hideki Maruyama, Muhummad Madden, Masato Aketagawa, Eiki Okuyama, Satoru Higuchi
Publikováno v:
International Journal of Surface Science and Engineering. 3:242
In this paper, we propose a measurement method for spindle radial, axial and angular motions using concentric circle grating interferometers. In this method, the grating is installed on top of the spindle. Three optical sensors, which consist of two