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Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:2287-2293
Test domes for measuring the pumping speed of cryopumps are defined in Pneurop standard PN5ASRCC/5 and the American Vacuum Society Recommended Practice for Cryopumps published in 1999. The test domes try to provide a measure of the speed of a pump as
Publikováno v:
Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; 2001, Vol. 19 Issue 5, p2287-2293, 7p