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pro vyhledávání: '"Yuri K. Verevkin"'
Autor:
Noemí Pérez, Ainara Rodriguez, Santiago M. Olaizola, Zuobin Wang, Mikel Echeverría, Joan Savall, T. Berthou, I. Ayerdi, Miguel Ellman, Yuri K. Verevkin, Changsi Peng
Publikováno v:
Microelectronic Engineering. 86:937-940
Periodic structures are of increasing interest in many fields such as nanotechnology and biotechnology among others. Laser Interference Lithography (LIL) has been widely studied for the fabrication of periodic structures. However, a LIL tool for the
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::3094dbf6f42474e2ccbc5a0eecfe9952
https://doi.org/10.1016/j.mee.2008.12.043
https://doi.org/10.1016/j.mee.2008.12.043
