Zobrazeno 1 - 3
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pro vyhledávání: '"Yunseo Jang"'
Autor:
Yunseo Jang1, Hyemin Na1, Sooyoung Choi2, Hojung Choi3, Youngwon Lee3, Kija Lee3 leekj@knu.ac.kr
Publikováno v:
Thai Journal of Veterinary Medicine. Jun2022, Vol. 52 Issue 2, p245-250. 6p.
Publikováno v:
Korean Journal of Health Education and Promotion. 38:63-72
Publikováno v:
IEEE Transactions on Semiconductor Manufacturing. 32:134-137
We report a comprehensive study on depth filter functionality by using a slurry, colloidal silica, used for chemical mechanical polishing process in semiconductor manufacturing. We show that the depth filters with nominal pore size ranging from 0.1 $