Zobrazeno 1 - 10
of 18
pro vyhledávání: '"Yunheub Song"'
Publikováno v:
Micromachines, Vol 8, Iss 10, p 312 (2017)
This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron bea
Externí odkaz:
https://doaj.org/article/4a8ef96e15ad4e0ab93fe78d0449d5ac
Publikováno v:
Micromachines, Vol 7, Iss 5, p 76 (2016)
This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass
Externí odkaz:
https://doaj.org/article/260200344cc24ac9a16f1f259fbd63d9
Publikováno v:
Microelectronics Reliability. 143:114941
Publikováno v:
2010 2nd IEEE International Conference on Network Infrastructure & Digital Content; 2010, p433-436, 4p
Publikováno v:
IEEE Transactions on Electron Devices; Jun2008, Vol. 55 Issue 6, p1456-1463, 8p
Publikováno v:
IEEE Transactions on Electron Devices; Jan2008, Vol. 55 Issue 1, p404-410, 7p
Publikováno v:
Semiconductor Science & Technology; Jan2018, Vol. 33 Issue 1, p1-1, 1p
Autor:
Yunheub Song, Sangeun Lee, Taeyong Kim, Jungin Han, Hungyu Lee, Sunyoung Kim, Junghwan Park, Sewoong Park, Joonhuk Choi, Jaewoo Kim, Daeyup Lee, Myoungkwan Cho, Kyucharn Park, Kinam Kim
Publikováno v:
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407); 2003, p91-92, 2p
Publikováno v:
Japanese Journal of Applied Physics; Apr2017, Vol. 56 Issue 4S, p1-1, 1p
Autor:
Juntae Choi, Yunheub Song
Publikováno v:
Japanese Journal of Applied Physics; Apr2017, Vol. 56 Issue 4S, p1-1, 1p