Zobrazeno 1 - 10
of 15
pro vyhledávání: '"Yun-Jun Huh"'
Publikováno v:
Chemical Engineering Science. 53:3729-3739
An adaptive model-predictive control (AMPC) algorithm was applied to the temperature control of a batch polymerization reactor for polymethylmethacrylate (PMMA) and the tracking performance for set point changes was investigated. An experimental cont
Publikováno v:
Korean Journal of Chemical Engineering. 9:164-168
To detect the cavities formed behind the impeller blades, the electrical resistivity tech-nique was employed in this study. The transition conditions between large cavity and clinging cavity were easily detected by the proposed method and the reliabi
Publikováno v:
Applied Physics Letters. 74:1248-1250
We have compared the electrical characteristics and the depth profile of ultrashallow junctions formed by boron implantation at 0.5 keV and BF2 implantation at 2.2 keV. The modeling of the boron profile was performed using the Monte Carlo method for
Autor:
Yun-Jun Huh, Jeong Soo Byun, Byung-Hak Lee, Jae Jeong Kim, Chang Hee Han, Ji-Soo Park, Dong Kyun Sohn
Publikováno v:
International Electron Devices Meeting 1998. Technical Digest (Cat. No.98CH36217).
We found that rapid thermal annealing treatment of amorphous WN/sub x//poly-Si resulted in denudation of nitrogen atoms with formation of low resistivity W and high reliable in situ barrier layer, simultaneously. Furthermore, electrical properties of
Autor:
Woo-Sik Kim, Dooyoung Yang, Kang-Sik Youn, Yun-Jun Huh, Hyunsang Hwang, Jae-Gyung Ahn, Jae Jeong Kim, Jin Won Park, Jae-Hee Ha
Publikováno v:
Proceedings of International Electron Devices Meeting.
Extensive reliability and performance characteristics of ultrashort channel CMOS devices with various process conditions for giga-bit DRAM were investigated. Using conventional process with various oxide thicknesses and doping profiles, we fabricated
Publikováno v:
MRS Proceedings. 564
The interaction and reactivity of Ti and Co with SiO2 and Si3N4 have been investigated. In the case of Ti salicide, SiO2 sidewall spacer showed no lateral silicide overgrowth and low leakage current between gate and source/drain up to silicidation te
Autor:
Dong Kyun Sohn, Hae Wang Lee, Nag Kyun Sung, Jin Won Park, Sang Hyuk Park, Jae-Gyung Ahn, Dae Kwan Kang, Ihl Hyun Cho, Yun Jun Huh, Hong Goo Choi, Seok-Woo Lee, Key Min Lee
Publikováno v:
Extended Abstracts of the 1999 International Conference on Solid State Devices and Materials.
Publikováno v:
Japanese Journal of Applied Physics. 37:L1347
In this letter, we have investigated the reliability characteristics 65Å-thick gate oxide grown in various hydrogen partial pressure. Compared with a dry oxide, device reliability characteristics such as charge-to-breakdown and stress-induced leakag
Autor:
Hyunsang Hwang, Kang-Sik Youn, Jae-Gyung Ahn, Dooyoung Yang, Jae-Hee Ha, Yun-Jun Huh, Jin-Won Park, Jae-Jeong Kim, Woo-Sik Kim
Publikováno v:
Proceedings of International Electron Devices Meeting; 1995, p435-438, 4p
Autor:
Byung Hak Lee, Dong Kyun Sohn, Ji-Soo Park, Chang Hee Han, Yun-Jun Huh, Jeong Soo Byun, Jae Jeong Kim
Publikováno v:
International Electron Devices Meeting 1998 Technical Digest (Cat No98CH36217); 1998, p385-388, 4p