Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Yumiko Mizukami"'
Publikováno v:
Applied Surface Science. 255:1391-1394
Impurity or elemental depth profiles are often influenced by the surface morphology changes during SIMS analyses. The surface morphology changes caused by ion bombardment depend on matrix material and have been reported on the materials such as Si, G
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d9e52da691df6a8ba9dbe7a08171219d
https://doi.org/10.1016/j.apsusc.2008.05.115
https://doi.org/10.1016/j.apsusc.2008.05.115
Autor:
Makoto Tsutsue, Kinya Goto, Yoshihiro Oka, Toshihiro Ohtsuka, Etsuyoshi Kobori, Kazuyoshi Tsukamoto, Kohei Seo, Kotaro Nomura, Susumu Matsumoto, Tetsuya Ueda, Yumiko Mizukami
Publikováno v:
2009 IEEE International Interconnect Technology Conference.
In order to control the characteristics of porogen-based porous SiOC film (k ≪ 2.5), we investigated its dependence on the wavelengths of ultraviolet (UV) light by using methods of FT-IR, TDS and nano-indentation. As a result, it was found that spe
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1ceefb132d489f0162f2625d4c553f4a
https://doi.org/10.1109/iitc.2009.5090352
https://doi.org/10.1109/iitc.2009.5090352